Communication middleware for semiconductor-fabrication equipment.
SMART-GEM is middleware for semiconductor-fabrication equipment with the function that conforms to the SEMI standard. SMART-GEM can automatically process many of necessary communications as GEM. As a result, suppressing the development man-hour of the manufacturing device control application becomes possible.
It conforms to the GEM standard. (additional basic performance + performance)
Many of communications are automated, and it contributes to the reduction in the device control application development man-hour.
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